Vacuum Pump Inlet Trap Protects Pumps Used In Deposition Processes

A high capacity vacuum inlet trap for protecting vacuum pumps used in highly corrosive deposition processes which generate large amounts of condensable byproducts is available from MV Products of No. Billerica, Massachusetts.

The MV Multi-Trap 16" Vacuum Inlet Trap features a knock-down stage, two stages of user-selectable filter elements, and cooling coils for removing condensable byproducts and corrosives from deposition process forelines. Designed to protect vacuum pumps used in ALD, HCD, Nitride, TEOS, TiN, and other demanding processes, this trap is constructed from 304 stainless steel and is available with ISO-160 flanges.

Capable of up to 2,500 in of solids accumulation, depending upon material, the MV Multi-Trap 16" Vacuum Inlet Trap can be customized with the following filter options: stainless steel gauze, micro-rated polypropylene, activated alumina or charcoal, Sodasorb and other types to remove residual solvent vapor acids and particulates. Filters offered are 4.5" and 9" tall.

The MV Multi-Trap 16" Vacuum Inlet Trap is priced from $ 4,800.00 (list) depending upon configuration. Quotations are available upon request.

SOURCE: MV Products